Designed for process stability
RF delivery, pulsing, and regulation features are engineered for demanding plasma process control.
Power and Motion Control
Advanced RF Plasma Generators for Semiconductor Manufacturing
AVA delivers high-precision pulsed RF power, fast auto frequency tuning, and reliable process control for next-generation plasma applications.
13.56 MHz platformUp to 6 kW forward powerAuto frequency tuningStandard & Advanced configurations
6 kW
forward power
13.56
MHz
<1 ms
auto tuning
Featured products
A focused 13.56 MHz RF generator family.
Choose the AVA platform that matches your forward power requirements, pulsing profile, and process-control needs.
13.56 MHz RF generator
AVA 1213
1.25 kW / 13.56 MHz
Pulsed RF Generator with Auto Frequency Tuning
1.25 kW
Forward power
13.56 MHz
Frequency
Pulsed RF
Generator type
Precision pulsing
Auto frequency tuning
Load regulation
Advanced configurations
About AVA
Analogic power-delivery experience, focused on semiconductor RF.
AVA is Analogic's RF plasma generator brand for semiconductor manufacturing. Analogic designs, develops, and manufactures world-class RF power amplifiers for various configurations and brings high-precision pulsing to semiconductor manufacturing.
The AVA product family applies Analogic's 40+ years of power delivery expertise from the medical industry to the growing semiconductor market, where precision, uptime, and process repeatability are essential.
Technology
Built for advanced process control.
AVA generators combine precision pulsing, frequency agility, and serviceable power delivery hardware for demanding plasma applications.
13.56 MHz platform
Forward/load regulation
Process stability
Plasma stability
Precision RF delivery for repeatable wafer processes.
AVA generators support high-precision pulsing and regulated RF power delivery for semiconductor plasma applications where process repeatability matters.
High-precision pulsed RF power
Stable delivery into plasma loads
Trusted for demanding semiconductor plasma processes
Credibility without invented testimonials.
AVA messaging stays grounded in the supplied product materials: technical assurance, process stability, and Analogic service capability.
Built for semiconductor plasma applications
A focused 13.56 MHz platform serving plasma generator and RF power amplifier requirements.
Supported by Analogic service capabilities
Power delivery knowledge from medical technology is applied to manufacturing and service support.