AVA 1213
1.25 kW / 13.56 MHz
Pulsed RF Generator with Auto Frequency Tuning
View AVA 1213
Product family
RF plasma generators for precision semiconductor processing.
The AVA 13.56 MHz family spans compact, mid-power, and high-power platforms with pulsing, auto frequency tuning, and process regulation capabilities.
13.56 MHz
Platform comparison
Specifications subject to change without notice.
| Product | Power | Frequency | Positioning | Datasheet |
|---|---|---|---|---|
| AVA 1213 | 1.25 kW / 1250 W | 13.56 MHz | Compact 13.56 MHz RF plasma generator for precision pulsed power delivery up to 1250 W. | |
| AVA 3013 | 3 kW / 3000 W | 13.56 MHz | Mid-power 13.56 MHz platform for pulsed RF delivery and advanced semiconductor plasma process control. | |
| AVA 6013 | 6 kW / 6000 W | 13.56 MHz | High-power 13.56 MHz RF plasma generator for advanced pulsed semiconductor plasma processes up to 6 kW. |