Precision process control
Forward, load, and process regulation options help maintain repeatable power delivery.
RF plasma generator
AVA 1213
1.25 kW / 1250 W / 13.56 MHz
Compact 13.56 MHz RF plasma generator for precision pulsed power delivery up to 1250 W.
Overview
Pulsed RF Generator with Auto Frequency Tuning
AVA 1213 brings high-precision pulsed RF power, fast auto frequency tuning, and process regulation into a compact platform for semiconductor plasma applications.
1250 W max forward power
+/-5% tuning range
50 microsecond minimum pulse width
Key highlights
- Pulsed RF generator with auto frequency tuning
- Forward power, load power, and DC bias/process regulation
- RS232 and 25-pin analog interfaces with fieldbus options
- Standard and Advanced configurations
- Advanced model supports multi-level arbitrary waveform pulsing
- Advanced features include CEX support, HALO, smoke detection, and optional water flow sensing
Technical specifications
Specifications subject to change without notice.
- Product
- AVA 1213
- Power
- 1.25 kW / 1250 W
- Frequency
- 13.56 MHz
- Type
- Pulsed RF Generator with Auto Frequency Tuning
- Tuning range
- +/-5%
- Load impedance
- 50 Ohm
- Max forward power
- 1250 W
- Max reflected power
- 300 W
- Power regulation
- Forward power, load power, DC bias/process
- Power regulation accuracy
- +/-2% of setpoint or +/-3 W, whichever is greater
- Harmonics
- <= -40 dBc with 50-Ohm load
- Spurious
- <= -45 dBc
- Efficiency
- >65% typical
- Pulsing
- Two-level digital or analog; advanced model supports multi-level arbitrary waveform pulsing
- Pulse synchronization
- Pulse-in SMA(F), pulse-out SMA(F)
- Minimum pulse width
- 50 microseconds
- Pulse PRF
- 100 Hz - 20 kHz
- Pulse duty cycle
- 1% - 99%
- Pulse rise time
- <4 microseconds
- Pulse fall time
- <0.2 microseconds
- Interfaces
- RS232, 25-pin analog
- Interface options
- Ethernet, EtherCAT, Profibus, DeviceNet
- Cooling
- Water and air
- Advanced features
- CEX support, auto frequency tuning under 1 ms, HALO max forward power 200 W, integrated smoke detector, optional water flow sensor
- Weight
- <11.5 kg / <25.4 lbs
- Dimensions
- 215.6 mm W x 441.7 mm L x 133.4 mm H
- Output connector
- N(F)
- AC line
- 187-228 VAC 1-phase, 50/60 Hz
Need help selecting the right AVA generator?
Align power level, pulsing behavior, regulation strategy, and interface requirements with your plasma process.
Fast frequency agility
Auto frequency tuning supports plasma stability when load conditions move quickly.
Analogic power-delivery expertise
Built on decades of high-reliability power delivery experience in demanding medical systems.
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