Precision process control
Forward, load, and process regulation options help maintain repeatable power delivery.
RF plasma generator
AVA 6013
6 kW / 6000 W / 13.56 MHz
High-power 13.56 MHz RF plasma generator for advanced pulsed semiconductor plasma processes up to 6 kW.
Overview
Pulsed RF Generator with Auto Frequency Tuning
AVA 6013 is the high-power AVA platform, delivering 6 kW forward power, wider frequency tuning, precision regulation, and advanced pulsing support.
6000 W max forward power
+/-10% tuning range
10 microsecond minimum pulse width
Key highlights
- Pulsed RF generator with auto frequency tuning
- Forward power, load power, and DC bias/process regulation
- RS232 and 25-pin analog interfaces with fieldbus options
- Standard and Advanced configurations
- Advanced model supports multi-level programmable arbitrary waveform pulsing
- Water-cooled high-power platform with DIN 7/16(F) output connector
Technical specifications
Specifications subject to change without notice.
- Product
- AVA 6013
- Power
- 6 kW / 6000 W
- Frequency
- 13.56 MHz
- Type
- Pulsed RF Generator with Auto Frequency Tuning
- Tuning range
- +/-10%
- Load impedance
- 50 Ohm
- Max forward power
- 6000 W
- Max reflected power
- 1500 W
- Power regulation
- Forward power, load power, DC bias/process
- Power accuracy
- +/-1.5% of setpoint or +/-2 W, whichever is greater
- Harmonics
- <= -40 dBc with 50-Ohm load
- Spurious
- <= -45 dBc
- Efficiency
- >65% typical at 6 kW
- Pulsing
- Dual-level digital or analog; advanced model supports multi-level programmable arbitrary waveform pulsing
- Pulse synchronization
- Pulse-in SMA(F), pulse-out SMA(F)
- Minimum pulse width
- 10 microseconds
- Pulse PRF
- 100 Hz - 10 kHz
- Pulse duty cycle
- 1% - 99%
- Pulse rise time
- <4 microseconds
- Pulse fall time
- <0.2 microseconds
- Interfaces
- RS232, 25-pin analog
- Interface options
- Ethernet, EtherCAT, Profibus, DeviceNet
- Cooling
- Water
- Advanced features
- CEX support, auto frequency tuning under 1 ms, HALO max forward power 200 W, integrated smoke detector, optional water flow sensor
- Weight
- <33.7 kg / <74.2 lbs
- Dimensions
- 483 mm W x 650 mm D x 131 mm H
- Output connector
- DIN 7/16(F)
- AC line
- 380-480 VAC 3-phase, 50/60 Hz, 30A
Need help selecting the right AVA generator?
Align power level, pulsing behavior, regulation strategy, and interface requirements with your plasma process.
Fast frequency agility
Auto frequency tuning supports plasma stability when load conditions move quickly.
Analogic power-delivery expertise
Built on decades of high-reliability power delivery experience in demanding medical systems.
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