RF plasma generator

AVA 3013

3 kW / 3000 W / 13.56 MHz

Mid-power 13.56 MHz platform for pulsed RF delivery and advanced semiconductor plasma process control.

Overview

Pulsed RF Generator with Auto Frequency Tuning

AVA 3013 scales AVA pulsed RF delivery to 3 kW with auto frequency tuning, robust reflected power handling, and advanced control options.

3000 W max forward power

+/-5% tuning range

600 W max reflected power

Pulsed RF generator with auto frequency tuning
Forward power, load power, and DC bias/process regulation
RS232 and 25-pin analog interfaces with fieldbus options
Standard and Advanced configurations
Advanced model supports multi-level programmable arbitrary waveform pulsing
Advanced features include CEX support, HALO, smoke detection, and optional water flow sensing

Specifications subject to change without notice.

Product: AVA 3013
Power: 3 kW / 3000 W
Frequency: 13.56 MHz
Type: Pulsed RF Generator with Auto Frequency Tuning
Tuning range: +/-5%
Load impedance: 50 Ohm
Max forward power: 3000 W
Max reflected power: 600 W
Power regulation: Forward power, load power, DC bias/process
Power regulation accuracy: +/-2% of setpoint or +/-3 W, whichever is greater
Harmonics: <= -40 dBc with 50-Ohm load
Spurious: <= -45 dBc
Efficiency: >65% typical
Pulsing: Two-level digital or analog; advanced model supports multi-level programmable arbitrary waveform pulsing
Pulse synchronization: Pulse-in SMA(F), pulse-out SMA(F)
Minimum pulse width: 50 microseconds
Pulse PRF: 100 Hz - 20 kHz
Pulse duty cycle: 1% - 99%
Pulse rise time: <4 microseconds
Pulse fall time: <0.2 microseconds
Interfaces: RS232, 25-pin analog
Interface options: Ethernet, EtherCAT, Profibus, DeviceNet
Cooling: Water and air
Advanced features: CEX support, auto frequency tuning under 1 ms, HALO max forward power 200 W, integrated smoke detector, optional water flow sensor
Weight: <20 kg / <44 lbs
Dimensions: 215.6 mm W x 402.6 mm D x 133.4 mm H
Output connector: N(F)
AC line: 187-228 VAC 3-phase, 50/60 Hz

Align power level, pulsing behavior, regulation strategy, and interface requirements with your plasma process.

Forward, load, and process regulation options help maintain repeatable power delivery.

Auto frequency tuning supports plasma stability when load conditions move quickly.

Built on decades of high-reliability power delivery experience in demanding medical systems.

Review the other AVA generators in the 13.56 MHz family.

1.25 kW / 13.56 MHz

Pulsed RF Generator with Auto Frequency Tuning

6 kW / 13.56 MHz

Pulsed RF Generator with Auto Frequency Tuning